300°C GaN/AlGaN Heterojunction Bipolar Transistor


Fan Ren
Department of Chemical Engineering, University of Florida

Cammy R. Abernathy
Department of Materials Science and Engineering, University of Florida

J. M. Van Hove, P. P. Chow, R. Hickman, JJ Klaasen
Blue Lotus Micro Devices, an SVT Associates company

R. F. Kopf
Bell Laboratories, Lucent Technologies

Hyun Cho, K. B. Jung
Department of Materials Science and Engineering, University of Florida

J. R. La Roche
Department of Chemical Engineering, University of Florida

R. G. Wilson
Charles Evans and Associates

J. Han, R. J. Shul, A. G. Baca
Sandia National Laboratories/New Mexico

S.J. Pearton
Department of Materials Science and Engineering, University of Florida

This article was received on Tuesday, September 8, 1998 and accepted on Wednesday, October 21, 1998.

Abstract

A GaN/AlGaN heterojunction bipolar transistor has been fabricated using Cl2/Ar dry etching for mesa formation. As the hole concentration increases due to more efficient ionization of the Mg acceptors at elevated temperatures (> 250°C), the device shows improved gain. Future efforts should focus on methods for reducing base resistance, which are briefly summarized.

Outline

  • Introduction
  • Experimental
  • Results and Discussion
  • Summary and Conclusions
  • Acknowledgments
  • Linked Pages

    Cite this article as: MRS Internet J. Nitride Semicond. Res. 3, 41(1998).

    last updated Thursday, February 22, 2001 1:16:38 PM.

    © 1998-2001 The Materials Research Society MRS Internet Journal of Nitride Semiconductor Research