Tables

Table 1

 Thermodynamic properties of elemental materials related to growth of group-III nitrides.
Component Phase Temperature range (K) H(298K) J/mol varphi0 varphi varphi-2 varphi-1 varphi1 varphi2 varphi3 reference
Al s 298.15-933.61 0 172.8289 50.51806 -0.00411847 1.476107 -458.1279 2105.75 -4168.337 [4]
Al l 933.61-3000 0 103.0714 26.00912 0.008181946 -0.4129445 32.24031 -43.76215 30.68377 [4]
Al g 298.15-3000 329700 217.0413 20.81346 0.000249045 0.60354813 -0.2495735 0.5140443 -0.5629165 [4]
Al2 g 298.15-3000 490380 353.35 48.47124 -0.00369942 1.6604767 -42.89068 106.9097 -115.6532 [4]
Ga s 100-302.91 0 241.3354 66.94004 -0.00324457 1.676481 -602.4515 0 0 [4]
Ga l 302.91-3000 0 126.5938 26.24945 0.001124295 0.1477694 -3.306797 7.960486 -4.117994 [4]
Ga g 298.15-3000 271979 268.3674 38.19512 -0.00269398 1.226597 -118.8071 194.3493 -161.9061 [4]
In s 100-429.78 0 28.56306 0.173385 0.001116428 0.3581493 621.9059 -2378.554 0 [4]
In l 429.78-3000 0 136.5535 27.6628 0.002004388 0.3864998 -7.11553 11.33041 -2.563969 [4]
In g 298.15-3000 240389 179.4259 5.544982 0.002369352 0.1624565 199.5227 -392.3531 350.0412 [4]
Cl g 298.15-3000 121302 230.4749 26.0518 -0.001404393 0.8484566 -26.44172 33.95742 -23.09449 [2]
Cl2 g 298.15-3000 0 315.6297 37.6554 -0.001818968 1.2427151 -0.7480257 -3.237695 19.2696 [2]
H g 298.15-3000 217998 166.7375 20.75064 0.000011002 0.61825525 0.3951741 -0.9575932 1.072888 [2]
H2 g 298.15-3000 0 205.5368 29.50487 0.000168424 0.86065612 -14.95312 78.18955 -82.78981 [2]
N g 298.15-3000 472680 205.2031 20.71029 0.000020737 0.61679049 0.9006424 -2.39269 3.047489 [2]
N2 g 298.15-3000 0 242.8156 21.47467 0.001748786 0.5910039 81.08497 -103.6265 71.30775 [2]

Table 2

 Thermodynamic properties of group-III hydrides.
Component Phase Temperature range (K) H(298K) J/mol varphi0 varphi varphi-2 varphi-1 varphi1 varphi2 varphi3 reference
AlH g 298.15-3000 248949 241.7735 23.45061 0.000267033 0.7561976 94.52152 -149.8564 133.8216 [4]
AlH2 g 298.15-3000 247058 263.5826 24.47025 0.000052127 0.887457 201.8884 -305.6576 247.8367 [4]
AlH3 g 298.15-3000 208143 247.6922 25.23092 -0.00247941 1.1974457 351.8847 -534.7299 424.2375 [4]
GaH g 298.15-3000 214301 256.9793 24.75093 -0.00017796 0.81698595 85.2476 -130.322 112.485 [4]
GaH2 g 298.15-3000 261000 283.1801 27.73824 -0.00098536 1.04260905 189.6211 -292.8738 234.49034
GaH3 g 298.15-3000 140000 262.5014 25.64802 0.000707271 1.05328668 360.1502 -557.6752 447.1876
InH g 298.15-3000 214704 268.5535 26.25779 -0.00068009 0.88853891 77.20851 -119.0338 104.2369 [4]
InH2 g 298.15-3000 301000 300.4066 30.93877 -0.00176795 1.1772364 174.5085 -275.3281 224.5262
InH3 g 298.15-3000 226000 298.3732 36.02385 -0.00383638 1.5631789 294.7202 -457.1725 368.1224

Table 3

 Thermodynamic properties of group-III chlorides.
Component Phase Temperature range (K) H(298K) J/mol varphi0 varphi varphi-2 varphi-1 varphi1 varphi2 varphi3 reference
GaCl g 298.15-3000 -70553 332.2718 37.11052 -0.000746187 1.1606512 4.891346 -4.467591 5.506236 [4]
GaCl2 g 298.15-3000 -241238 443.2976 57.74584 -0.002265112 1.8755545 3.66186 -9.356338 15.88245 [4]
GaCl3 s 298.15-351 -525000 117.602 22.661 0 1.768938 1229.9 0 0 [4]
GaCl3 l 351.-1000 -525000 426.622 105.0455 0.000857935 2.0378948 55.82225 -187.023 316.5247 [4]
GaCl3 g 298.15-3000 -431573 526.8113 82.03355 -0.003486473 2.6855923 8.278878 -14.5678 12.8899 [4]
Ga2Cl6 g 298.15-3000 -957552 945.776 180.9567 -0.007721776 5.923436 14.74793 -26.29971 23.6243 [4]

Table 4

 Thermodynamic properties of group-III metal-organic compounds.
Component Phase Temperature range (K) H(298K) J/mol varphi0 varphi varphi-2 varphi-1 varphi1 varphi2 varphi3 reference
AlCH3 g 298.15-3000 70000 305.5526 35.03927 -0.00174578 1.4497961 350.8434 -441.7573 302.0432
Al(CH3)3 g 298.15-3000 -87864 439.3127 67.03525 -0.00997983 3.579156 1117.969 -1438.63 1005.325
Al2(CH3)6 g 298.15-3000 -268000 732.0682 153.8187 -0.02210495 7.934453 2291.222 -2980.321 2100.53
GaCH3 g 298.15-3000 79000 310.9298 33.36529 -0.00299805 1.4928029 363.5709 -463.8545 321.0485
Ga(CH3)2 g 298.15-3000 78000 420.9466 58.61963 -0.00830238 2.828981 634.9377 -719.8074 425.8506
Ga(CH3)3 g 298.15-3000 -45100 419.6335 56.51964 -0.00623311 3.1207383 1253.185 -1835.496 1583.225
InCH3 g 298.15-3000 215000 327.9518 37.02704 -0.00234819 1.5345267 331.9569 -408.1081 273.5027
In(CH3)3 g 298.15-3000 207000 486.1998 75.34946 -0.00966392 3.760722 1060.398 -1344.147 926.5466

Table 5

 Thermodynamic properties of compound species related to growth of group-III nitrides. (*) Indexes s- and a- denotes the molecules C2H2 having different bond configurations: HC=CH and H2C=C respectively.
Component Phase Temperature range (K) H(298K) J/mol varphi0 varphi varphi-2 varphi-1 varphi1 varphi2 varphi3 reference
CH g 298.15-3000 597370 242.7524 24.00883 0.001670102 0.6407824 37.86651 15.51023 -45.27447 [3]
CH2 g 298.15-3000 390421 240.600 20.52894 0.002739503 0.5603418 152.657 -143.930 66.92434 [3]
CH3 g 298.15-3000 146300 235.311 21.73794 0.001495276 0.7668275 260.1063 -286.5025 170.8566 [3]
CH4 g 298.15-3000 -74600 160.1245 0.1376158 0.003060968 0.2359966 530.4743 -641.3777 443.8204 [3]
s-C2H2* g 298.15-3000 227400 290.1858 41.22485 -0.00318242 1.5993697 185.8367 -182.5197 98.56432 [3]
a-C2H2* g 298.15-3000 406000 295.9776 34.44796 -0.000729682 1.2620663 225.396 -274.2221 181.7939
C2H4 g 298.15-3000 52400 235.4331 20.90119 -0.004640969 1.384579 557.1087 -729.554 519.1573 [3]
C2H5 g 298.15-3000 107000 232.3991 10.06969 -0.00231435 1.0455083 730.0119 -972.2628 700.7000 [3]
C2H6 g 298.15-3000 -84000 210.8502 12.79009 -0.00332157 1.28072185 834.093 -1099.041 784.2161 [3]
HCl g 298.15-3000 -92310 243.9878 23.15984 0.001819985 0.6147384 51.16604 -36.89502 9.174252 [2]
HN3 g 298.15-3000 294000 318.1457 37.99594 -0.003275438 1.5385397 231.3021 -308.8172 225.2746 [2]
NH4Cl s 298.15-1500 -314553 1655.076 514.7979 -0.05652215 14.5633 -6619.275 24457.48 -41827.86 [5]
NH3 g 298.15-3000 -45940 231.1183 20.52222 0.000716251 0.7677236 244.6296 -251.69 146.6947 [2]
NH2 g 298.15-3000 190000 242.1951 21.06781 0.002580563 0.5819481 147.4422 -141.0088 79.39323 [2]
NH g 298.15-3000 338885 241.3573 24.14921 0.001711517 0.6418191 38.52613 -13.20793 -8.079821 [2]
N2H2 g 298.15-3000 211860 259.887 22.8261 -0.000935 0.966786 245.36 -151.638 0 [2]
N2H4 g 298.15-3000 95180 301.5557 37.05947 -0.006113206 1.8485832 412.1844 -493.5967 319.4443 [2]

Table 6

 Thermodynamic properties of adducts related to growth of group-III nitrides.
Component Phase Temperature range (K) H(298K) J/mol varphi0 varphi varphi-2 varphi-1 varphi1 varphi2 varphi3 reference
Al·NH3 g 298.15-3000 250000 348.4526 41.86005 0.000211864 1.4472277 255.1086 -257.7037 141.7346
(Al·N)3 g 298.15-3000 -525000 543.3702 108.7302 -0.01831327 4.594580 171.8226 -290.5235 248.8242
MMA·NH g 298.15-3000 -190000 414.2169 61.61885 -0.00253783 2.3779207 423.3068 -509.5931 332.8755
(MMA·NH)3 g 298.15-3000 -750000 892.3664 202.2196 -0.03836758 9.739639 1407.448 -1800.317 1257.067
TMA·NH3 g 298.15-3000 -246000 588.4401 112.231 -0.01885472 5.621111 1273.086 -1552.79 1055.969
(DMA·NH2)3 g 298.15-3000 -760000 1195.758 324.3533 -0.06284943 15.81051 2406.101 -2903.563 1950.622
Ga·NH3 g 298.15-3000 200000 353.3958 40.79851 0.000266934 1.4191327 264.0403 -272.4233 153.5392
(Ga·N)3 g 298.15-3000 -360000 609.4856 122.2825 -0.01653284 4.809612 77.69752 -1333.739 1154.612
MMG·NH g 298.15-3000 -130000 418.7216 60.2648 -0.00183430 2.3002024 434.3678 -528.0146 347.8084
(MMG·NH)3 g 298.15-3000 -520000 946.5981 213.6344 -0.03663681 9.919197 1347.501 -1711.188 1184.161
TMG·NH3 g 298.15-3000 -170000 530.7141 87.98152 -0.00725578 4.304382 1467.071 -1874.727 1297.835
(DMG·NH2)3 g 298.15-3000 -525000 1021.0 264.9086 -0.04829547 13.504477 2918.077 -3839.803 2751.129
(DMA·NH2)2(DMG·NH2) g 298.15-3000 -680000 1129.111 302.3056 -0.05821187 15.004891 2596.184 -3249.624 2246.259
(DMA·NH2) (DMG·NH2)2 g 298.15-3000 -600000 1084.095 285.9634 -0.05281923 14.281768 2738.584 -3512.749 2471.468
GaCl3·NH3 g 298.15-3000 -619000 602.7288 99.90594 -0.003368528 3.512104 365.2924 -445.3745 295.2586

Table 7

 Thermodynamic properties of group-III nitrides.
Component Phase Temperature range (K) H(298K) J/mol varphi0 varphi varphi-2 varphi-1 varphi1 varphi2 varphi3 reference
AlN s 298.15-2000 -319000 124.0509 45.23707 -0.00732285 1.861658 25.72751 -26.7394 39.61092
AlN g 298.15-3000 438530 307.9826 32.62139 -0.00060462 1.0388258 25.05068 29.55234 -64.15543 [4]
GaN s 298.15-2000 -114000 160.2647 52.86351 -0.00799055 2.113389 1.313428 -2.441129 1.945731
GaN g 298.15-3000 221659 313.033 33.77197 -0.00212262 1.1675484 25.48238 -42.78832 36.53425
InN s 298.15-1400 -71000 182.0219 58.73762 -0.00885117 2.347111 2.118085 -2.740333 -1.525678

Table 1s

 Thermodynamic properties of elemental materials related to growth of group-III nitrides (ChemKin format).
Component Phase a1 a2 a3 a4 a5 a6 a7 reference
Al s 0.19463122E+01 0.57014083E-02 -0.11246948E-04 0.11906191E-07 -0.40549592E-11 -0.75595051E+03 -0.89767193E+01 [4]
Al l 0.38186714E+01 0.35092866E-13 -0.29243825E-16 0.10296049E-19 -0.13010214E-23 0.31529158E+03 -0.17522257E+02 [4]
Al g 0.26386461E+01 -0.33361981E-03 0.29072954E-06 -0.10687702E-09 0.14019385E-13 0.39560925E+05 0.48317142E+01 [4]
Al2 g 0.40327689E+01 0.31080371E-02 -0.26555275E-05 0.10139488E-08 -0.14265000E-12 0.57660543E+05 0.42808346E+01 [4]
Ga s 0.31516549E+01 0.47487811E-03 -0.13114719E-05 0.66957280E-09 -0.10309042E-12 0.31761301E+05 0.22722336E+01 [4]
Ga l 0.37332207E+01 -0.14576218E-02 0.12593146E-05 -0.45013529E-09 0.58809512E-13 -0.78157088E+03 -0.13777782E+02 [4]
Ga g 0.31516549E+01 0.47487811E-03 -0.13114719E-05 0.66957280E-09 -0.10309042E-12 0.31761301E+05 0.22722336E+01 [4]
In s 0.28708331E+01 0.50895697E-03 0.23897104E-05 0 0 -0.89967232E+3 -0.96810646E+01 [4]
In l 0.40047221E+01 -0.16093120E-02 0.12357138E-05 -0.40475261E-09 0.50565275E-13 -0.11326205E+04 -0.14615689E+02 [4]
In g 0.17106240E+01 0.27284880E-02 -0.15237756E-05 0.24935117E-09 -0.13543811E-14 0.28294009E+05 0.10393415E+02 [4]
Cl g 0.24863802E+01 0.85400259E-03 -0.10102948E-05 0.41513823E-090 -0.57351897E-13 0.13818230E+05 0.54745422E+01 [2]
Cl2 g 0.36723063E+01 0.19959920E-02 -0.17664869E-05 0.67118808E-09 -0.85427189E-13 -0.11692930E+04 0.53710238E+01 [2]
H g 0.24999969E+01 0.40554262E-16 -0.69589660E-19 0.36480813E-22 -0.59810677E-26 0.25473925E+05 -0.46019397E+00 [2]
H2 g 0.35835513E+01 -0.50820648E-03 0.80582475E-06 -0.26671703E-09 0.28964961E-13 -0.10611936E+04 -0.45955646E+01 [2]
N g 0.25022205E+01 -0.10929503E-04 0.17136711E-07 -0.10629382E-10 0.22781404E-14 0.56105014E+05 0.41705817E+01 [2]
N2 g 0.33489922E+01 0.22852471E-03 0.66433042E-06 -0.38603865E-09 0.60257282E-13 -0.10137940E+03 0.38564836E+01 [2]

Table 2s

 Thermodynamic properties of group-III hydrides (ChemKin format).
Component Phase a1 a2 a3 a4 a5 a6 a7 reference
AlH g 0.29920505E+01 0.19313058E-02 -0.89008762E-06 0.17659140E-09 -0.66198110E-14 0.28971460E+05 0.49959763E+01 [4]
AlH2 g 0.29899556E+01 0.49326258E-02 -0.25346247E-05 0.60656427E-09 -0.53207711E-13 0.28624960E+05 0.72437680E+01 [4]
AlH3 g 0.19873363E+01 0.11164632E-01 -0.65786378E-05 0.18095101E-08 -0.19009482E-12 0.23999886E+05 0.10457201E+02 [4]
GaH g 0.29623752E+01 0.21304955E-02 -0.11056997E-05 0.27502882E-09 -0.23505502E-13 0.24805959E+01 0.65474670E+01 [4]
GaH2 g 0.29812282E+01 0.55323277E-02 -0.31765828E-05 0.84445499E-09 -0.85359368E-13 0.30282972E+05 0.85657017E+01
GaH3 g 0.24500013E+01 0.10867555E-01 -0.66409192E-05 0.18952949E-08 -0.20627448E-12 0.15680233E+05 0.93830393E+01
InH g 0.29152219E+01 0.24766074E-02 -0.14984347E-05 0.44210391E-09 -0.47914809E-13 0.24856256E+05 0.76777967E+01 [4]
InH2 g 0.30615829E+01 0.60170750E-02 -0.38185434E-05 0.11155913E-08 -0.12315586E-12 0.35053547E+05 0.91236129E+01
InH3 g 0.29241131E+01 0.10796226E-01 -0.69214730E-05 0.20533707E-08 -0.23055240E-12 0.25887243E+05 0.79935951E+01

Table 3s

 Thermodynamic properties of group-III chlorides (ChemKin format).
Component Phase a1 a2 a3 a4 a5 a6 a7 reference
GaCl g 0.40828200E+01 0.10275066E-02 -0.82584758E-06 0.30159693E-09 -0.38982556E-13 -0.18930553E+05 0.53481325E+01 [4]
GaCl2 g 0.58256772E+01 0.27618590E-02 -0.24086603E-05 0.89405236E-09 -0.11624406E-12 -0.30854559E+05 0.22752045E+01 [4]
GaCl3 s 0.27254950E+01 0.29584829E-01 0 0 0 -0.65270941E+05 -0.82328905E+01 [4]
GaCl3 l 0.13109770E+02 0 0 0 0 -0.67257972E+05 -0.54894857E+02 [4]
GaCl3 g 0.81264039E+01 0.43397075E-02 -0.37045176E-05 0.13443762E-08 -0.17473299E-12 -0.54492248E+05 -0.83485211E+01 [4]
Ga2Cl6 g 0.17907141E+02 0.95219173E-02 -0.81418255E-05 0.29569337E-08 -0.38442017E-12 -0.12086372E+06 -0.44330387E+02 [4]

Table 4s

 Thermodynamic properties of group-III metal-organic compounds (ChemKin format).
Component Phase a1 a2 a3 a4 a5 a6 a7 reference
AlCH3 g 0.33152363E+01 0.10730808E-01 -0.53649153E-05 0.13219641E-08 -0.12963324E-12 0.69985773E+04 0.69088112E+01
Al(CH3)3 g 0.32762275E+01 0.38648068E-01 -0.21169742E-04 0.57086106E-08 -0.60677829E-12 -0.13086231E+05 0.12164379E+02
Al2(CH3)6 g 0.77694495E+01 0.81503404E-01 -0.45707472E-04 0.12565890E-07 -0.13556605E-11 -0.37792596E+05 -0.66613696E+01
GaCH3 g 0.25578342E+01 0.12336949E-01 -0.66536191E-05 0.17697148E-08 -0.18602651E-12 0.82459942E+04 0.11507155E+02
Ga(CH3)2 g 0.31015884E+01 0.24665912E-01 -0.13279303E-04 0.35247826E-08 -0.36978377E-12 0.74707731E+04 0.13886280E+02
Ga(CH3)3 g 0.19674198E+01 0.47163954E-01 -0.37019398E-04 0.17197050E-07 -0.34877739E-11 -0.78124671E+04 0.18869043E+02
InCH3 g 0.32606827E+01 0.10945619E-01 -0.56676425E-05 0.14649582E-08 -0.15127365E-12 0.24447299E+05 0.92182406E+01
In(CH3)3 g 0.43958263E+01 0.36932913E-01 -0.20120601E-04 0.54175515E-08 -0.57640580E-12 0.22113910E+05 0.89579139E+01

Table 5s

 Thermodynamic properties of compound species related to growth of group-III nitrides (ChemKin format). (*) Indexes s- and a- denotes the molecules C2H2 having different bond configurations: HC=CH and H2C=C respectively.
Component Phase a1 a2 a3 a4 a5 a6 a7 reference
CH g 0.36138827E+01 -0.82828147E-03 0.16896253E-05 -0.68730072E-09 0.89176108E-13 0.70792073E+05 0.15886242E+01 [3]
CH2 g 0.36456497E+01 0.95155874E-03 0.13138435E-05 -0.78153507E-09 0.11901737E-12 0.45817667E+05 0.23139800E+01 [3]
CH3 g 0.32140185E+01 0.49932545E-02 -0.10666071E-05 -0.94179151E-10 0.41825069E-13 0.16425353E+05 -0.32620959E+00 [3]
CH4 g 0.15216894E+01 0.94206100E-02 -0.20358736E-05 -0.16954382E-09 0.84231104E-13 -0.98265001E+04 0.11015042E+02 [3]
s-C2H2* g 0.32873503E+01 0.84711075E-02 -0.47845151E-05 0.14062688E-08 -0.16380579E-12 0.26033038E+05 0.30977851E+01 [3]
a-C2H2* g 0.37432140E+01 0.64649821E-02 -0.29878974E-05 0.67863179E-09 -0.61508807E-13 0.47452584E+05 0.36880757E+01
C2H4 g 0.51347290E+00 0.18255281E-01 -0.97529218E-05 0.25543735E-08 -0.26359173E-12 0.54190726E+04 0.18407655E+02 [3]
C2H5 g 0.41356879E+00 0.19656915E-01 -0.92762870E-05 0.20790714E-08 -0.17976542E-12 0.11950162E+05 0.22444201E+02 [3]
C2H6 g 0.14469981E+00 0.23658897E-01 -0.11545008E-04 0.27146353E-08 -0.24972355E-12 -0.11100895E+05 0.20160466E+02 [3]
HCl g 0.35477617E+01 -0.52495759E-03 0.12539209E-05 -0.55704126E-09 0.77853020E-13 -0.12146858E+05 0.23571698E+01 [2]
HN3 g 0.30696955E+01 0.91823215E-02 -0.55000486E-05 0.16008807E-08 -0.18008554E-12 0.34082455E+05 0.87750511E+01 [2]
NH4Cl s 0.15779218E+02 -0.32826760E-01 0.68126014E-04 -0.42994252E-07 0.91512370E-11 -0.41599526E+05 -0.71376421E+02 [5]
NH3 g 0.28571756E+01 0.49698173E-02 -0.10459846E-05 -0.59616310E-10 0.33876824E-13 -0.65887633E+04 0.54578631E+01 [2]
NH2 g 0.36485140E+01 0.99709004E-03 0.11450996E-05 -0.67166863E-09 0.10319335E-12 0.21710932E+05 0.23089927E+01 [2]
NH g 0.36081623E+01 -0.70482845E-03 0.13400834E-05 -0.56265529E-09 0.77335350E-13 0.39703545E+05 0.13808122E+01 [2]
N2H2 g 0.22848311E+01 0.65332679E-02 -0.10485018E-05 -0.26377069E-09 0.67449391E-13 0.24519210E+05 0.11328618E+02 [2]
N2H4 g 0.18125618E+01 0.16115998E-01 -0.90347623E-05 0.25420769E-08 -0.28283711E-12 0.10250740E+05 0.13915855E+02 [2]

Table 6s

 Thermodynamic properties of adducts related to growth of group-III nitrides (ChemKin format).
Component Phase a1 a2 a a4 a5 a6 a7 reference
Al·NH3 g 0.51515143E+01 0.58573417E-02 -0.16170505E-05 0.11451009E-09 0.12133096E-13 0.28286069E+05 -0.48274682E-01
(Al·N)3 g 0.45513774E+01 0.24224744E-01 -0.19583472E-04 0.68617042E-08 -0.87066457E-12 -0.65417224E+05 0.37152416E+01
MMA·NH g 0.53000416E+01 0.15817580E-01 -0.89597704E-05 0.25398503E-08 -0.28426358E-12 -0.19047211E+05 -0.38015130E-01
(MMA·NH)3 g 0.58446617E+01 0.78028253E-01 -0.51959593E-04 0.16480119E-07 -0.19828760E-11 -0.94988106E+05 0.64522837E+01
TMA·NH3 g 0.63159729E+01 0.46337132E-01 -0.24201379E-04 0.62752490E-08 -0.64727423E-12 -0.33328111E+05 -0.89507418E+00
(DMA·NH2)3 g 0.11133625E+02 0.12201319E+00 -0.75594693E-04 0.22848140E-07 -0.26665328E-11 -0.99526181E+05 -0.26267281E+02
Ga·NH3 g 0.50415777E+01 0.60423017E-02 -0.17099375E-05 0.13220508E-09 0.11191167E-13 0.22297756E+05 0.14946460E+01
(Ga·N)3 g 0.67417325E+01 0.20698420E-01 -0.17293197E-04 0.61883733E-08 -0.79656592E-12 -0.79656592E-12 -0.47959352E+01
MMG·NH g 0.54128110E+01 0.15466515E-01 -0.85993868E-05 0.23946771E-08 -0.26421186E-12 -0.14257212E+05 0.34268502E+00
(MMG·NH)3 g 0.78421436E+01 0.75178598E-01 -0.50082986E-04 0.15895148E-07 -0.19139941E-11 -0.67809637E+05 -0.17042245E+01
TMG·NH3 g 0.72199138E+01 0.43905101E-01 -0.21992163E-04 0.54490488E-08 -0.53816240E-12 -0.24366705E+05 -0.51898207E+01
(DMG·NH2)3 g 0.87149890E+01 0.12611576E+00 -0.78186312E-04 0.23569819E-07 -0.27410200E-11 -0.70701723E+05 -0.15101017E+02
(DMA·NH2)2(DMG·NH2) g 0.73936341E+01 0.13562588E+00 -0.92917003E-04 0.31735301E-07 -0.42292280E-11 -0.89258078E+05 -0.90006738E+01
(DMA·NH2) (DMG·NH2)2 g 0.97937059E+01 0.12425531E+00 -0.76968702E-04 0.23215922E-07 -0.27027562E-11 -0.79971211E+05 -0.20135984E+02
GaCl3·NH3 g 0.99445135E+01 0.14131038E-01 -0.81793973E-05 0.23593607E-08 -0.26734087E-12 -0.77974368E+05 -0.15271713E+02

Table 7s

 Thermodynamic properties of group-III nitrides (ChemKin format).
Component Phase a1 a2 a3 a4 a5 a6 a7 reference
AlN s 0.16484984E+00 0.16906333E-01 -0.19156391E-04 0.95997888E-08 -0.17389262E-11 -0.39016612E+05 -0.27932794E+01
AlN g 0.35951625E+01 0.12581327E-02 -0.17178569E-06 -0.42709248E-10 0.83346116E-14 0.51617150E+05 0.66104571E+01 [4]
GaN s 0.51341560E+00 0.18306308E-01 -0.21633569E-04 0.11081026E-07 -0.20603428E-11 -0.14507663E+05 -0.31255765E+01
GaN g 0.31180378E+01 0.28153203E-02 -0.22191154E-05 0.76417778E-09 -0.95775476E-13 0.25622984E+05 0.93780951E+01
InN s -0.17387340E+01 0.34314485E-01 -0.52155647E-04 0.35199074E-07 -0.87726745E-11 -0.91507858E+04 0.70544505E+01 
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last updated Friday, September 17, 1999 10:29:47 AM.

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