High-resolution SEM image of a GaN layer grown at near-stoichiometric conditions. The estimated surface roughness is ~20 nm, as determined by the nano-crystalline grains.
High-resolution SEM image of a GaN layer grown at near-stoichiometric conditions. It illustrates the columnar structure of small grains in the layer cross-section, while the surface part of the GaAs substrate shows neither indication of hollows, nor presence of polycrystalline structure.