5 µm x 5 µm AFM image of the surface morphology of a (0001) oriented GaN film (Ga-face). The MBE film, grown at 750°C, is about 0.7 µm thick, and was grown on top of a 1 µm thick MOCVD-grown GaN film on sapphire. The grey-scale of the image ranges from 0 (black) to 24 nm (white).