This article was received on Thursday, January 15, 1998 and
accepted on Monday, July 27, 1998.
Abstract
We demonstrate that our secondary mass ion spectroscopy (SIMS) method
for the determination of the mole fraction in solid
InxGa1-xN solutions is accurate and reproduceable without need of reference samples. The method is based on measuring
relative current values of CsM+ (M=Ga, In) secondary ions. The claim
of reliable SIMS determination without reference samples was confirmed by four
independent analytical methods on the same samples with a relative error in the
InN mole fraction determination below 15%.
