Epitaxial Growth and Orientation of GaN on (1 0 0) gamma-LiAlO2


E. S. Hellman
Bell Laboratories, Lucent Technologies

Z. Liliental-Weber
Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley CA 94720

D. N. E. Buchanan
Bell Laboratories, Lucent Technologies

This article was received on Friday, June 20, 1997 and accepted on Monday, September 15, 1997.

Abstract

The (1 0 0) face of gamma-LiAlO2 has attracted attention as a possible substrate for GaN epitaxial growth. This is partly because this face has an excellent lattice and structural match to (1 (-1) 0 0) GaN. This orientation would have a misfit of only -1.4% along the c-direction and -0.1% along the b-direction of LiAlO2. We find that in practice this orientation relationship does not occur; instead, (0 0 0 1) oriented GaN grows with a small tilt (0.6° towards the c-direction) between the film and substrate. Although the misfit along the substrate b direction is large (-6.3%) for this orientation, the tilt perfectly accommodates the -1.4% misfit in the c direction. We present characterization of these films by RHEED, X-ray diffraction, and TEM. We propose that the tilt is driven by a reduction of interface energy which occurs in polar, incoherent interfaces.

Outline

  • Introduction
  • Epitaxial Growth
  • Film Characterization
  • Transmission Electron Microscopy
  • X-ray diffraction
  • SIMS
  • Electrical
  • Discussion
  • Conclusion
  • Acknowledgments
  • Linked Pages

    Cite this article as: MRS Internet J. Nitride Semicond. Res. 2, 30(1997).

    last updated Wednesday, August 12, 1998 1:08:53 AM.

    © 1997-1998 The Materials Research Society MRS Internet Journal of Nitride Semiconductor Research
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