Epitaxial Growth and Orientation of GaN on (1 0 0)
-LiAlO2
E. S. Hellman
Bell Laboratories, Lucent Technologies
Z. Liliental-Weber
Materials Science Division, Lawrence Berkeley National Laboratory, Berkeley CA 94720
D. N. E. Buchanan
Bell Laboratories, Lucent Technologies
This article was received on Friday, June 20, 1997 and
accepted on Monday, September 15, 1997. Abstract
The (1 0 0) face of
-LiAlO2 has
attracted attention as a possible substrate for GaN epitaxial growth. This is
partly because this face has an excellent lattice and structural match to
(1
0 0) GaN. This orientation would have a misfit of
only -1.4% along the c-direction and -0.1% along the b-direction
of LiAlO2. We find that in practice this orientation relationship
does not occur; instead, (0 0 0 1) oriented GaN grows with a
small tilt (0.6° towards the c-direction) between the film and
substrate. Although the misfit along the substrate b direction is large
(-6.3%) for this orientation, the tilt perfectly accommodates the -1.4% misfit
in the c direction. We present characterization of these films by RHEED,
X-ray diffraction, and TEM. We propose that the tilt is driven by a reduction
of interface energy which occurs in polar, incoherent interfaces.
Outline
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Cite this article as: MRS Internet J. Nitride Semicond. Res. 2, 30(1997).
last updated Wednesday, August 12, 1998 1:08:53 AM.© 1997-1998 The Materials Research Society
