Tables for MIJ-NSR Volume 2, Article 29

Tables

Table I

Correlation of Leak Valve Setting and PEMBE Chamber Pressure.

Leybold Leak Valve Setting	PEMBE Chamber Pressure
4.9	1.4 x 10^-5 Torr
5.2	4.3 x 10^-5 Torr
5.5	1.4 x 10^-4 Torr
5.8	3.8 x 10^-4 Torr

Table II

Summary of the experimental In_xGa_1-xN matrix varying alloy composition and growth temperature.

Target Film Composition	Unheated Substrate (~60°C)	Substrate Heated to 200°C	Substrate Heated to 400°C
InN	X-ray: x=1 E_G = 1.68 eV	X-ray: x=1	X-ray: x=1 E_G = 1.67 eV
In_0.75Ga_0.25N	X-ray: x=0.82 E_G = 1.91 eV	X-ray: x=0.85 E_G = 1.82 eV	X-ray: x=0.85 E_G = 1.85 eV
In_0.5Ga_0.5N	X-ray: x=0.60 E_G = 2.03 eV	X-ray: x=0.59 E_G = 2.0 eV	X-ray: x=0.71 E_G = 1.99 eV
In_0.25Ga_0.75N	X-ray: x=0.35 E_G = 2.46 eV	X-ray: x=0.48	X-ray: x=0.48 E_G = 2.32 eV
GaN	X-ray: x=0.28 E_G = 3.10 eV	X-ray: x=0.27 E_G = 3.24 eV	X-ray: x=0.10 E_G = 3.06 eV

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