GaInN/GaN-Heterostructures and Quantum Wells Grown by Metalorganic Vapor-Phase Epitaxy
A. Sohmer, J. Off, H. Bolay, V. Härle, V. Syganow, Jin Seo Im, V. Wagner, F. Adler, Andreas Hangleiter , A. Dörnen, Ferdinand Scholz
4. Physikalisches Institut, Universität Stuttgart
D. Brunner, O. Ambacher
Walter Schottky Institut, Technische Universität München
H. Lakner
Werkstoffe der Elektrotechnik, Gerhard-Mercator-Universität Duisburg
This invited article was received on Wednesday, May 7, 1997 and
accepted on Tuesday, July 22, 1997. Abstract
The dependence of the In-incorporation efficiency and the optical
properties of MOVPE-grown GaInN/GaN-heterostructures on various growth
parameters has been investigated. A significant improvement of the
In-incorporation rate could be obtained by increasing the growth rate and
reducing the H