Surface morphology of as grown and annealed bulk GaN crystals


G. Nowak, S. Krukowski, I. Grzegory, S. Porowski
High Pressure Research Center

Jacek M. Baranowski , K. Pakula
Institute of Experimental Physics, Warsaw University

J. Zak
Department of Chemistry, Silesian Technical University

This article was received on Friday, May 31, 1996 and accepted on Wednesday, August 14, 1996.

Abstract

GaN single crystals have been grown from Ga solution. The crystals grow in the form of platelets with their basal plane perpendicular to the c-axis. The two opposite crystal surfaces are not equivalent since one is N- and the other Ga-terminated. Atomic force microscopy has been applied to study surface morphology on both surfaces. It was found that one side is atomically flat. The other side consists of pyramid-like structures about 25 nm in size.

The influence of annealing in an NH3+H2 atmosphere in the temperature range from 600°C to 900°C was investigated. Depending on crystal face the results were drastically different. It was found that on the rough side, annealing yields an atomically flat surface with terraces of monolayer height. The size of the terraces depends on the temperature of the annealing. On the originally flat side the surface becomes rougher after annealing. The transformation of surface morphology begins at temperatures below 700°C. Preliminary results of annealing in a hydrogen atmosphere are also reported. These findings are crucial for the understanding and development of GaN homoepitaxy.

Outline

  • Introduction
  • Experiment
  • Results
  • Discussion
  • Summary
  • Linked Pages

    Cite this article as: MRS Internet J. Nitride Semicond. Res. 1, 5(1996).

    last updated Thursday, September 16, 1999 8:47:14 PM.

    © 1996-1999 The Materials Research Society MRS Internet Journal of Nitride Semiconductor Research
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