Temperature distribution in the chamber used for crystal growth of GaN under high pressure of nitrogen


S. Krukowski
High Pressure Research Center

This article was received on June 4, 1996 and accepted on October 30, 1996.

Abstract

The theoretical analysis of high pressure influence on the conditions of crystal growth of GaN is presented. High pressure influence on the transport and equilibrium properties of nitrogen is estimated using scaling approach. Nitrogen gas properties are used in the finite element calculation of the thermal conditions in the high pressure chamber. The temperature distribution during GaN growth in the vertical temperature-gradient configuration is obtained.

Outline

  • Introduction
  • Nitrogen properties under high pressure
  • Density and thermal expansion coefficient
  • Activity
  • Heat capacity at constant pressure
  • Thermal conductivity
  • Viscosity
  • Summary
  • Finite element calculations
  • Summary
  • Acknowledgement
  • Linked Pages

    Cite this article as: MRS Internet J. Nitride Semicond. Res. 1, 27(1996).

    last updated October 29, 1997 1:58:21 PM.

    © 1996-1997 The Materials Research Society MRS Internet Journal of Nitride Semiconductor Research
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